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學習快評丨qibao666888　　“目??(mu)前?(qian)??，碳??(tan)化??(hua)硅??(gui)襯??(chen)底??(di)材??(cai)料??(liao)成?(cheng)本??(ben)居??(ju)高??(gao)不??(bu)下??(xia)??，嚴??(yan)重??(zhong)阻?(zu)礙??(ai)了??(le)碳??(tan)化??(hua)硅?(gui)器??(qi)件??(jian)的??(de)大??(da)規??(gui)模??(mo)應??(ying)用??(yong)??。??”西??(xi)湖??(hu)大??(da)學??(xue)工??(gong)學??(xue)院??(yuan)講??(jiang)席??(xi)教??(jiao)授??(shou)仇??(chou)旻??(旻)介??(jie)紹??(shao)??，碳??(tan)化??(hua)硅??(gui)行?(xing)業??(ye)降??(jiang)本??(ben)增??(zeng)效??(xiao)的??(de)重??(zhong)要??(yao)途??(tu)徑??(jing)之??(zhi)一?(yi)??，是??(shi)制??(zhi)造??(zao)更??(geng)大??(da)尺??(chi)寸??(cun)的??(de)碳??(tan)化?(hua)硅??(gui)襯??(chen)底??(di)材??(cai)料??(liao)??。與??(yu)6英??(ying)寸??(cun)和?(he)8英??(ying)寸??(cun)襯??(chen)底??(di)相??(xiang)比??(bi)??，12英??(ying)寸?(cun)碳??(tan)化?(hua)硅??(gui)襯??(chen)底??(di)材??(cai)料?(liao)擴??(kuo)大??(da)了??(le)單??(dan)片??(pian)晶??(jing)圓??(yuan)上??(shang)可??(ke)用??(yong)于??(yu)芯??(xin)片??(pian)制??(zhi)造??(zao)的??(de)面??(mian)積??(ji)??，在?(zai)同??(tong)等?(deng)生??(sheng)產??(chan)條??(tiao)件??(jian)下??(xia)??，可??(ke)顯??(xian)著??(zhu)提??(ti)升??(sheng)芯??(xin)片?(pian)產??(chan)量??(liang)??，同??(tong)時??(shi)降??(jiang)低??(di)單??(dan)位??(wei)芯??(xin)片??(pian)制??(zhi)造??(zao)成??(cheng)本??(ben)??。。